Equipment for the chemical treatment of silicon-optical components

Project: To implement facilities within CEA CESTA megajoule laser (MJL) building, which will be used to remove the anti-reflection treatment present on the surface of silicon-optical components via the use of a strongly basic chemical solution

Aims and characteristics:

  • To guarantee complete treatment of optical components
  • To provide for the handling of components while significantly limiting the risk of damage
  • To ensure the compatibility of the materials with a strongly basic chemical solution, therefore requiring the use of materials which will not degrade, to avoid any environmental contamination
  • To guarantee a watertight transfer of effluents during the filling and emptying of tanks
  • To design a facilities compatible with the operating requirements of ISO 8 clean room environments, and which meets nuclear safety requirements
  • To allow for easy adjustment of different parameters for operators, workstation ergonomics, operator safety and reduced maintenance

CSTI Group services:

  • Measurement, design and machine production studies
  • Calculations
  • Sourcing
  • Machine manufacturing
  • Factory tests and acceptance following the test program
  • Disassembly, packaging and delivery to CEA CESTA
  • On-site installation
  • Submission of the complete manufacturer’s file

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